Transmission Electron Microscopy (TEM)
Transmission Electron Microscopy (TEM) and Scanning Transmission Electron Microscopy (STEM) are connected strategies that use an electron beam to picture a sample. Higher electrical power electrons, incident on an ultra-thin samples allow for image resolutions that are on the purchase of one - two Angstroms. As opposed to SEM, S/TEM has better spatial resolution, is capable of supplemental analytical measurements, and calls for substantially additional sample planning.
Whilst a lot more time consuming than lots of other widespread analytical equipment, the prosperity of data readily available from these experiments is impressive. Not only can you acquire remarkable picture resolution, it is also attainable to characterize crystallographic phase, crystallographic orientation (both equally by diffraction mode experiments), generate elemental maps (employing EDS), and pictures that highlight elemental contrast (dark subject mode)—all from nm sized places that can be precisely found. STEM and TEM can be the greatest failure examination equipment for skinny movie and IC samples.
ApplicationWhilst a lot more time consuming than lots of other widespread analytical equipment, the prosperity of data readily available from these experiments is impressive. Not only can you acquire remarkable picture resolution, it is also attainable to characterize crystallographic phase, crystallographic orientation (both equally by diffraction mode experiments), generate elemental maps (employing EDS), and pictures that highlight elemental contrast (dark subject mode)—all from nm sized places that can be precisely found. STEM and TEM can be the greatest failure examination equipment for skinny movie and IC samples.
- Identification of nm sized defects on integrated circuits, like embedded particles and residues at the bottom of vias.
- Determination of crystallographic phases as a perform of distance from an interface.
- Nanoparticle characterization: Core/shell investigations, agglomeration, results of annealing…
- Catalyst support protection.
- Ultra smaller region elemental maps.
- III-V super lattice characterization
Appropriate Industries
- Compound Semiconductors
- Intergrated circuit
- Magnetic media
- Nanomaterials
- MEMS
- Opto-electronics
- Semiconductors
Strengths of TEM Evaluation
- The greatest elemental mapping resolution of any analytical approach.
- Sub .2 nm picture resolution.
- Compact location crystallographic info
Limitations of TEM Examination
- Considerable sample planning time
- Samples are typically ready that are <100nm<br>
- Some materials not stable to electron beam
